Manufacturing apparatus of coordinate detecting device

ABSTRACT

A coordinate detecting device includes a resistive film formed on a substrate and a common electrode for applying a voltage to the resistive film, wherein a potential distribution is created in the resistive film, an electric potential of the resistive film at a contact position is detected, and a position of the contact position of the resistive film is detected. In a manufacturing apparatus, a laser light source irradiates laser light to remove a part of the resistive film to form a resistive film removed part, an optical system converges the laser light, a plurality of probes measure electric potentials of a surface of the resistive film with the common electrode providing the voltage to the resistive film, an X-Y table moves the substrate at least two-dimensionally, and a control part controls the X-Y table and the laser light source.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority of theprior Japanese Patent Application No. 2008-128140, filed on May 15,2008, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a manufacturing apparatus formanufacturing a coordinate detecting device.

2. Description of the Related Art

For example, as an input device for a computer system, a touch panel isknown. A touch panel may be mounted on a display device, and, may besuch that, a coordinate position on the display device is detected, anda detection signal according to the coordinate position may be obtained.Thus, the touch panel makes it possible to input the detection signalaccording to the coordinate position to the computer system directly,and thus, the touch panel makes it possible to carry out easy andintuitive input.

For a touch panel, various types such as a resistive film type, anoptical type, a capacity coupling type, and so forth, are proposed.Among such touch panels, a touch panel of the resistive film type iscommon, which has a simple configuration and requires a simple controlsystem. The resistive film type touch panel may be of a four-wire type,a five-wire type, an eight-wire type or of many different types todispose electrodes on a resistive film.

Among these types, the five-wire type touch panel does not have aproblem concerning edge sliding which may be a problem of the four-wiretype touch panel and an eight-wire type touch panel. This is because, inthe five-wire type touch panel, an electrically conductive film of anupper substrate disposed on an operating surface side is used only forreading an electric potential. Therefore, the five-wire type touch panelis used in a market which requires a tough operation environment ordurability for a long term.

FIG. 9 depicts an example of a configuration of a five-wire typeresistive film type touch panel. The five-wire type resistive film typetouch panel 1 depicted in FIG. 9 includes an upper substrate 11 and alower substrate 12. In the lower substrate 12, a transparent resistivefilm 22 is formed on the whole area of a glass substrate 21, and X-axiscoordinate detecting electrodes 23, 24 and Y-axis coordinate detectingelectrodes 25, 26 are formed on the transparent resistive film 22. Inthe upper substrate 11, a transparent resistive film 32 is formed on afilm substrate 31, and a coordinate detecting electrode 33 is formed onthe transparent resistive film 32.

In the five-wire type resistive film type touch panel 1, first, avoltage is applied between the X-axis coordinate detecting electrodes 23and 24. As a result, an electric potential distribution occurs along anX-axis direction X1-X2 of the transparent resistive film 22 of the lowersubstrate 12. Then, by detecting an electric potential of thetransparent resistive film 22 of the lower substrate 12 at a position atwhich the upper substrate 11 comes into contact with the lower substrate12, it is possible to detect an X coordinate of the position at whichthe upper substrate 11 comes into contact with the lower substrate 12.Next, a voltage is applied between the Y-axis coordinate detectingelectrodes 25 and 26. As a result, an electric potential distributionoccurs along a Y-axis direction Y1-Y2 of the transparent resistive film22 of the lower substrate 12. Then, by detecting an electric potentialof the transparent resistive film 22 of the lower substrate 12 at aposition at which the upper substrate 11 comes into contact with thelower substrate 12, it is possible to detect a Y coordinate of theposition at which the upper substrate 11 comes into contact with thelower substrate 12.

At this time, in such a type of a touch panel, how the electricpotential distribution can be created uniformly along each of the X-axisdirection X1-X2 and the Y-axis direction Y1-Y2 of the transparentresistive film 22 of the lower substrate 12 may be a problem. As amethod to solve the problem, Japanese Laid-Open Patent Application No.10-83251 (referred to as a patent document 1) discloses a method ofproviding a plurality of stages of electric potential distributioncorrecting patterns in the periphery of a resistive film.

Japanese Laid-Open Patent Application No. 2001-125724 (referred to as apatent document 2) discloses a method of providing a common electrodewhich surrounds the periphery of an input surface. Japanese Laid-OpenPatent Application No. 2007-25904 (referred to as a patent document 3)discloses a method of forming opening parts in an insulative filmprovided on a transparent resistive film, and providing an electricpotential from the opening parts.

It is noted that, reducing a size of such a coordinate detecting devicemay be required because size reduction of an apparatus in which thecoordinate detecting device is mounted is required. According to acoordinate detecting device disclosed in the patent document 1, it maybe difficult to reduce a size of the coordinate detecting device sincethe plurality of stages of electric distribution correcting patterns areprovided in the periphery of the resistive film as mentioned above.

In the method disclosed by the patent document 2 to provide a commonelectrode which surrounds the periphery of an input surface as mentionedabove, an electric potential distribution of a transparent resistivefilm may be distorted unless a resistance ratio of the transparentresistive film and a pattern resistance is increased.

In the method disclosed by the patent document 3 to form opening partsin an insulative film provided on a transparent resistive film, althoughthe above-mentioned two problems may be solved, a complicatedmanufacturing process may be required. Especially, a yield of productperformance may degrade because of a possible variation of a material ora resistance value which may occur during manufacturing.

SUMMARY OF THE INVENTION

The present invention has been devised in consideration of theabove-mentioned points, and an object of the present invention is toprovide a manufacturing apparatus such that it is possible tomanufacture a coordinate detecting device having a reduced size andhaving improved coordinate position detecting capability with highproductivity.

According to the present invention, a manufacturing apparatus of acoordinate detecting device for manufacturing a coordinate detectingdevice is provided. The coordinate detecting device has a resistive filmformed on a substrate and a common electrode which applies a voltage tothe resistive film. In the coordinate detecting device, an electricpotential distribution is created in the resistive film, an electricpotential of the resistive film at a position at which a probe comesinto contact is detected, and a coordinate of the position of theresistive film is detected. The manufacturing apparatus includes a laserlight source which irradiates laser light to remove a part of theresistive film and form a resistive film removed part, an optical systemwhich converges the laser light, a plurality of probes which measureelectric potentials of a surface of the resistive film in a state inwhich a voltage is applied to the resistive film via the commonelectrode, an X-Y table which moves the substrate at leasttwo-dimensionally, and a control part which controls the X-Y table andthe laser light source.

Additional objects and advantages of the embodiment are set forth inpart in the description which follows, and in part will become obviousfrom the description, or may be learned by practice of the invention.The object and advantages of the invention will be realized and attainedby means of the elements and combinations particularly pointed out inthe appended claims. It is to be understood that both the foregoinggeneral description and the following detailed description are exemplaryand explanatory only and are not restrictive of the inventions asclaimed.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 depicts a configuration of a manufacturing apparatus in anembodiment;

FIG. 2 depicts a relationship between wavelength and transmittance of aglass substrate and a transparent resistive film;

FIG. 3 depicts a configuration of a coordinate detecting devicemanufactured by the manufacturing apparatus in the embodiment;

FIGS. 4A, 4B, 4C, 4D and 4E depict a configuration of a panel part ofthe coordinate detecting device depicted in FIG. 1;

FIG. 5 depicts a partial plan view of a resistive film removed parts ofthe coordinate detecting device depicted in FIGS. 4A, 4B, 4C, 4D and 4E;

FIGS. 6A and 6B depict a configuration of an upper substrate of thecoordinate detecting device depicted in FIG. 1;

FIG. 7 depicts a flow chart of operation carried out by an interfaceboard of the coordinate detecting device depicted in FIG. 1;

FIGS. 8A and 8B depict states of electric potential distribution in alower substrate of the coordinate detecting device depicted in FIG. 1;

FIG. 9 depicts a configuration of a five-wire-type resistive film-typetouch panel in the related art; and

FIG. 10 depicts a block diagram of a computer which a control circuitdepicted in FIG. 1 may include.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

According to a preferred embodiment, a manufacturing apparatus formanufacturing a coordinate detecting device is provided. The coordinatedetecting device includes a resistive film formed on a substrate and acommon electrode which applies a voltage to the resistive film. In thecoordinate detecting device, an electric potential distribution iscreated on the resistive film, an electric potential of the resistivefilm at a position at which a probe comes into contact is detected, anda coordinate of the position on the resistive film is detected. Themanufacturing apparatus includes a laser light source which irradiateslaser light to remove a part of the resistive film and form a resistivefilm removed part, an optical system which converges the laser light, aplurality of probes which measure electric potentials on a surface ofthe resistive film in a state in which the common electrode provides avoltage to the resistive film, an X-Y table which moves the substrate atleast two-dimensionally, and a control part which carries out control ofthe X-Y table and the laser light source.

In the manufacturing apparatus in the preferred embodiment, thesubstrate of the coordinate detecting device may be made of aninsulative material which transmits the laser light, and the laser lightmay be irradiated by the laser light source from a surface of thesubstrate of the coordinate detecting device, opposite to a surface ofthe substrate of the coordinate detecting device on which the resistivefilm is formed.

Further, in the manufacturing apparatus in the preferred embodiment, theplurality of probes may be provided on a side of the substrate of thecoordinate detecting device opposite to a side of the substrate of thecoordinate detecting device on which the laser light source is provided.

Further, in the manufacturing apparatus in the preferred embodiment, theresistive film of the coordinate detecting device may be made of amaterial including ITO (Indium Tin Oxide), or indium oxide, tin oxide orzinc oxide.

Further, in the manufacturing apparatus in the preferred embodiment, thesubstrate and the resistive film of the coordinate detecting device maybe transparent in a visible region.

Further, in the manufacturing apparatus in the preferred embodiment, awavelength of the laser light may fall within a range between 340 and420 [nm].

Further, in the manufacturing apparatus in the preferred embodiment, thelaser light source may be an excimer laser.

In the preferred embodiment, it is possible to provide the manufacturingapparatus by which it is possible to manufacture a coordinate detectingdevice having a reduced size and having improved coordinate positiondetecting capability with high productivity.

The manufacturing apparatus in the preferred embodiment will now bedescribed more specifically with reference to FIG. 1.

[Manufacturing Apparatus]

The manufacturing apparatus in the preferred embodiment includes an X-Ytable 51 which has a function of moving a glass substrate 131 of acoordinate detecting device two-dimensionally, a laser light source 52,an optical system used to converge laser light emitted by the laserlight source 51 to a transparent resistive film 132 of the coordinatedetecting device made of ITO or such formed on the glass substrate 131of the coordinate detecting device, and a control circuit 54 whichcontrols movement of the X-Y table 51 and timing of oscillation of thelaser light source 52. The control circuit 54 and the X-Y table 51 areconnected together by a cable 55 for communication of a control signal,power supply and so forth, and the control circuit 54 and the laserlight source 52 are connected together by a cable 56 for communicationof a control signal, power supply and so forth. Further, probes 57 andan electric potential measuring unit 58 for measuring electricpotentials on the transparent resistive film 132 are provided. Theprobes 57 are made to come into contact with a surface of thetransparent resistive film 132 in a state in which a voltage is appliedto the transparent resistive film 132 via a common electrode 134 of thecoordinate detecting device, not depicted, which will be describedlater, and electric potentials on the transparent resistive film 132 aremeasured with the use of the probes 57.

As will be described later, corresponding portions of the transparentresistive film 132 of the coordinate detecting device are removed toform resistive film removed parts 133 based on information of theelectric potentials on the transparent resistive film 132 thus measuredwith the use of the probes 57. For the purpose of applying a voltage tothe transparent resistive film 132 via the common electrode 134 formeasuring the electric potentials on the transparent resistive film 132as mentioned above, the probes 57 include probes for applying a voltageto the common electrode 134. A specific method of removing of thecorresponding portions of the transparent resistive film 132 to form theresistive film removed parts 133 based on information of the measuredelectric potentials will be described later when a manufacturing methodis described.

It is noted that the glass substrate 131 of the coordinate detectingdevice on which the transparent resistive film 132 is formed is set tothe X-Y table 51 in such a manner that the laser light source 52 islocated on a side of the glass substrate 131 opposite to a side on whichthe transparent resistive film 132 is formed. Further, the probes 57 andthe electric potential measuring unit 58 are set on a side of the glasssubstrate 131 on which the transparent resistive film 132 is formed,opposite to a side of the glass substrate 131 on which the laser lightsource 52 is provided. It is noted that the glass substrate 131 and thetransparent resistive film 132 depicted in FIG. 1 are depicted with anexaggerated thickness for explanatory purposes.

As mentioned above, the probes 57 and the electric potential measuringunit 58 are provided on the side of the glass substrate 131 opposite tothe side on which the laser light source 52 is provided. Thereby, it ispossible to irradiate laser light by means of the laser light source 52without regard to the existence of the probes 57 and the electricpotential measuring unit 58. Thus, a freedom for an arrangement in themanufacturing apparatus improves, and also, it is possible to carry outwork in the manufacturing apparatus with less restriction. Thus, it ispossible to improve working efficiency.

In the manufacturing apparatus configured as described above withreference to FIG. 1, the glass substrate 131 of the coordinate detectingdevice on which the transparent resistive film 132 is formed is placedon the X-Y table 51. In this state, with the X-Y table 51 moving theglass substrate 131 two-dimensionally, the laser light source 52irradiates a predetermined area of the transparent resistive film 132with laser light to form the resistive film removed part 133. The laserlight source 52 is an excimer laser in the embodiment, and a wavelengthof laser light emitted by the laser light source 52 is approximately 355[nm]. The glass substrate 131 transmits laser light of the wavelength,but the transparent resistive film 132 has low transmittance withrespect to laser light of the wavelength. Therefore, in thepredetermined area to which laser light of the wavelength is thusirradiated, the glass substrate 131 transmits the laser light, and thetransparent resistive film 132 thus having the low transmittance absorbsthe laser light. Therefore, as a result of the laser light being thusirradiated, the transparent resistive film 132 is removed by ablationfrom the surface of the glass substrate 131 in the predetermined area towhich the laser light has been thus irradiated. Thus, each resistivefilm removed part 133 is formed as a hole bored in the transparentresistive film 132.

Specifically, as depicted in FIG. 2, transmittance of the glasssubstrate 131 and transmittance of the transparent resistive film 132are different with respect to a light wavelength. Especially, around 355[nm] in wavelength, such a wavelength region exists that a differencebetween transmittance of the glass substrate 131 and transmittance ofthe transparent resistive film 132 is large, where the glass substrate131 transmits laser light but the transparent resistive film 132 has lowtransmittance with respect to the laser light. Although specific valuesare slightly different among specific materials of the transparentresistive film 132, a wavelength falling within a range between 340 and420 [nm] is transmitted by the glass substrate 131, and can be used toremove the transparent resistive film 132 for the resistive film removedpart 133. This fact was obtained by the inventor from empiricalobservation. In the embodiment, under the foundation, laser light of thewavelength of 355 [nm] is used to remove a part of the transparentresistive film 132 for the resistive film removed part 133.

Thus, in the manufacturing apparatus in the embodiment, thepredetermined area of the transparent resistive film 132 formed on theglass substrate 131 is removed for the resistive film removed part 133.Each predetermined area in which the transparent resistive film 132 isthus removed has a shape such that, as described later, an electricpotential distribution in the transparent resistive film 132 can be madeuniform. In the embodiment, as the material of the transparent resistivefilm 132, ITO is used. Further, instead, such a material, which includesindium oxide, tin oxide or zinc oxide, and is transparent in a visibleregion, may be used as a material of the transparent resistive film 132.Also in such a case, the same effect as that in the case where ITO isused as the material of the transparent resistive film 132 in theembodiment can be obtained.

[Coordinate Detecting Device and Manufacturing Method of CoordinateDetecting Device]

Next, a coordinate detecting device manufactured by the manufacturingapparatus in the embodiment will be described. Specifically, a lowersubstrate 121 described later is manufactured by the manufacturingapparatus in the embodiment.

(System Configuration)

FIG. 3 depicts a configuration of a system in the coordinate detectingdevice in an embodiment. As the coordinate detecting device 100 in theembodiment, a five-wire type resistive film type touch panel will bedescribed. The coordinate detecting device 100 in the embodimentincludes a panel part 111 and an interface board 112.

The panel part 111 includes the lower substrate 121, an upper substrate122, a spacer 123 and a FPC (Flexible Printed Circuit) cable 124. Thelower substrate 121 and the upper substrate 122 are bonded together viathe spacer 123. The spacer 123 is made of an insulative double-sidedadhesive tape, or such. The spacer 123 bonds the lower substrate 121 andthe upper substrate 122 together in such a state that a predeterminedspace is kept between the lower substrate 121 and the upper substrate122. The FPC cable 124 has such a configuration that, on a flexibleprinted circuit board, first through fifth wires are formed. The FPCcable 124 is connected to the lower substrate 121 as a result of, forexample, thermo-compression bonding being carried out with the use ofanisotropic electrically conductive films or such.

(Lower Substrate 121)

Next, a configuration of the lower substrate 121 will be described withreference to FIGS. 4A, 4B, 4C, 4D and 4E. FIG. 4A depicts a plan view ofthe lower substrate 121. FIG. 4B depicts a sectional view of the lowersubstrate 121 taken along a line 4B-4B. FIG. 4C depicts a sectional viewof the lower substrate 121 taken along a line 4C-4C. FIG. 4D depicts asectional view of the lower substrate 121 taken along a line 4D-4D. FIG.4E depicts a sectional view of the lower substrate 121 taken along aline 4E-4E.

The lower substrate 121 includes the glass substrate 131, thetransparent resistive film 132, resistive film removed parts 133, acommon electrode 134, a first insulative film 135, first through fourthwires 136-1, 136-2, 136-3 and 136-4 and a second insulative film 137. Onthe glass substrate 131, the transparent resistive film 132 is formedapproximately all over the area of the glass substrate 131. Thetransparent resistive film 132 may be formed as a result of, forexample, a film being made of ITO or such being formed by a vacuumdeposition method or such, transmits light of a visible region and has apredetermined resistance.

(Resistive Film Removed Parts 133)

The resistive film removed parts 133 are formed at positions of thetransparent resistive film 132 in the periphery of the glass substrate131, to the inside of an area in which the common electrode 134 isformed. As depicted in FIG. 5, a space W between each adjacent ones ofthe resistive film removed parts 133 is equal to each other. As will bedescribed later, the space W between each adjacent ones of the resistivefilm removed parts 133 corresponds to an electric potential providingpart 141 described later. A pitch between each adjacent ones of theresistive film removed parts 133 is longer around each of both ends ofeach of a first side 171-1, a second side 171-2, a third side 171-3 anda fourth side 171-4 of a rectangular shape of the panel part 121, andbecomes shorter as approaching the center between both ends of each ofthe first through fourth sides 171-1, 171-2, 171-3 and 171-4, asdepicted in FIGS. 4A and 5. Specifically, from each of both ends throughthe center for each of the first through fourth sides 171-1, 171-2,171-3 and 171-4, the pitches P1, P2, P3, P4, . . . of the resistive filmremoved parts 133 are such that P1>P2>P3>P4, . . . , as depicted in FIG.5.

(Electric Potential Providing Parts 141)

Each of the above-mentioned electric potential providing parts 141 is apart of the transparent resistive film 132 left between each adjacentones of the resistive film removed parts 133 in which the transparentresistive film 132 is removed as mentioned above. Through the electricpotential providing parts 141, electric potentials are provided to theentire area of the transparent resistive film 132 from the commonelectrode 134. In the embodiment, specifically, with reference to FIGS.4A, 4B, 4C, 4D, 4E and 5, a pitch between each adjacent ones of theelectric potential providing parts 141 is longer around each of bothends of each of the first through fourth sides 171-1, 171-2, 171-3 and171-4 of the panel part 121, and becomes shorter as approaching thecenter between both ends of each of the first through fourth sides171-1, 171-2, 171-3 and 171-4. By thus configuring the electricpotential providing parts 141, it is possible to reduce distortion of anelectric potential distribution, if any, around the first through fourthsides 171-1, 171-2, 171-3 and 171-4 in which the electric potentialdistribution is likely to be distorted remarkably. Thus, it is possibleto make uniform the electric potential distribution created on thetransparent resistive film 132 by configuring the electric potentialproviding parts 141 as mentioned above. Thereby, it is possible todetect a coordinate position in the coordinate detecting device 100precisely.

It is noted that, specific shapes of the resistive film removed parts133 are not limited to those depicted in FIGS. 4A, 4B, 4C, 4D, 4E and 5.The resistive film removed parts 133 may have any shape as long as,consequently, the electric potential distribution created on thetransparent resistive film 132 is made uniform by the function of theresistive film removed parts 133 or the electric potential providingparts 141.

(Common Electrode 134)

The common electrode 134 is made of Ag—C, for example, and is formed onthe transparent resistive film 132 outside of the resistive film removedparts 133.

As depicted in FIG. 4A, the common electrode 134 extends along the foursides 171-1, 171-2, 171-3 and 171-4 of the rectangular shape of thelower substrate 121.

(First Insulative Film 135)

The first insulative film 135 is formed in such a manner that the firstinsulative film 135 is provided above the resistive film removed parts133 and covers the common electrode 134. The first insulative film 135has first through fourth through holes 151-1, 151-2, 151-3 and 151-4formed therein in respective four corners of the rectangular shape ofthe lower substrate 121. The first through fourth through holes 151-1,151-2, 151-3 and 151-4 act as driving voltage applying parts.

(First Through Fourth Wires 136-1 Through 136-4)

The first wire 136-1 is made of a low resistance material such as Ag,for example, and is formed on the first insulative film 135 along withthe first side 171-1 of the lower substrate 121. The first wire 136-1further extends to embed in the first through hole 151-1 formed in thefirst insulative film 135 to be connected with the common electrode 134at a first corner at which the first through hole 151-1 is provided, asdepicted in FIG. 4C. Further, the first wire 136-1 is connected to thecorresponding first wire included in the FPC cable 124 depicted in FIG.3.

Similarly, a second wire 136-2 is made of a low resistance material suchas Ag, for example, and is formed on the first insulative film 135 alongwith the second side 171-2 opposite to the first side 171-1 of the lowersubstrate 121. The second wire 136-2 further extends to embed in thesecond through hole 151-2 formed in the first insulative film 135 to beconnected with the common electrode 134 at a second corner at which thesecond through hole 151-2 is provided. Further, the second wire 136-2 isconnected to the corresponding second wire included in the FPC cable 124depicted in FIG. 3.

A third wire 136-3 is made of a low resistance material such as Ag, forexample, and is formed on the first insulative film 135 along with ahalf of the third side 171-3 on the side of the second side 171-2, thethird side 171-3 being perpendicular to the first and second sides 171-1and 171-2 of the lower substrate 121. The third wire 136-3 furtherextends to embed in the third through hole 151-3 formed in the firstinsulative film 135 to be connected with the common electrode 134 at athird corner at which the third through hole 151-3 is provided. Further,the third wire 136-3 is connected to the corresponding third wireincluded in the FPC cable 124 depicted in FIG. 3.

A fourth wire 136-4 is made of a low resistance material such as Ag, forexample, and is formed on the first insulative film 135 along with ahalf of the third side 171-3 of the lower substrate 121 on the side ofthe first side 171-1. The fourth wire 136-4 further extends to embed inthe fourth through hole 151-4 formed in the first insulative film 135 tobe connected with the common electrode 134 at a fourth corner at whichthe fourth through hole 151-4 is provided. Further, the fourth wire136-4 is connected to the corresponding fourth wire included in the FPCcable 124 depicted in FIG. 3.

The second insulative film 137 is formed on the first insulative film135 to cover the first through fourth wires 136-1, 136-2, 136-3 and136-4. Further, the upper substrate 122 is bounded above the secondinsulative film 137 via the spacer 123 depicted in FIG. 3.

(Upper Substrate 122)

Next, a configuration of the upper substrate 122 will be described withreference to FIGS. 6A and 6B. FIG. 6A depicts a top view of the uppersubstrate 122, and FIG. 6B depicts a sectional view of the uppersubstrate 122. It is noted that the upper substrate 122 depicted in FIG.6B is depicted with an exaggerated thickness for explanatory purposes.The upper substrate 122 includes a film substrate 211, a transparentresistive film 212 and an electrode 213. The film substrate 211 is madeof, for example, a resin film having flexibility of a material such asPET (polyethylene terephthalate).

On a side of the film substrate 211 opposite to the lower substrate 121,the transparent resistive film 212 is formed throughout the whole areaof the film substrate 211. The transparent resistive film 212 is made ofa transparent electrically conductive material such as ITO, for example.

The electrode 213 is disposed on the transparent resistive film 212 ofthe upper substrate 122 at an end of an X1 direction as depicted inFIGS. 6A and 6B. The electrode 213 is connected to the fifth wire of theFPC cable 124 via a contact (not depicted). It is noted that the FPCcable 124 is also connected with the lower substrate 121 as depicted inFIG. 3. The upper substrate 122 is used as a probe, and an electricpotential on the transparent resistive film 132 provided on the lowersubstrate 121 at which the upper substrate 122 comes into contact withis detected, by means of the interface board 112. Thus, a coordinateposition is detected in the coordinate detecting device 100.

(Detecting Procedure)

Next, a procedure of detecting a coordinate position in the coordinatedetecting device 100 in the embodiment will be described. FIG. 7 depictsa flow chart of an operation carried out by the interface board 112.FIGS. 8A and 8B depict electric potential distributions created on thetransparent resistive film 132 provided on the lower substrate 121. FIG.8A depicts an electric potential distribution created along the Xdirection X1-X2 when an X coordinate is detected. FIG. 8B depicts anelectric potential distribution created along the Y direction Y1-Y2 whena Y coordinate is detected.

It is noted that, in the coordinate detecting device 100, as depicted inFIG. 3, the spacer 123 is inserted between the lower substrate 121 andthe upper substrate 122, and thereby, the upper substrate 122 is apartfrom the transparent resistive film 132 formed on the lower substrate121 with the predetermined space as mentioned above. In the state, whena certain position on the upper substrate 122 is pressed downwardly (ina direction Z2), the upper substrate 122 comes into contact with thetransparent resistive film 132 at the certain position.

In step S1-1, the interface board 112 applies a voltage Vx to the firstwire 136-1 and the second wire 136-2, and grounds the third wire 136-3and the fourth wire 136-4. Thus, the voltage Vx is applied to the firstand second corners (corresponding to the first and second through holes151-1 and 151-2) of the common electrode 134, and the third and fourthcorners (corresponding to the third and fourth through holes 151-3 and151-4) of the common electrode 134 are grounded. As a result, anelectric potential distribution is created along four sides of thecommon electrode 134. Then, from the four sides of the common electrode134 along which the electric potential distribution is thus created,electric potentials are provided to the inside to the transparentresistive film 132 via the respective ones of the electric potentialproviding parts 141. As a result, an electric potential distributionwhich is uniform along the direction of X1-X2 as depicted by brokenlines in FIG. 8A is created on the transparent resistive film 132. It isnoted that, in the related art, an electric potential distribution maybe distorted as depicted by dash-dotted lines in FIG. 8A. According tothe coordinate detecting device in the embodiment, such distortion isavoided by the function of the resistive film removed part 133 or theelectric potential providing parts 141, and precise detection of anX-coordinate can be carried out.

Next, in step S1-2, the interface board 112 detects, via the uppersubstrate 122 and the fifth wire of the FPC cable 124, an electricpotential on the transparent resistive film 132 at the above-mentionedcertain position at which the upper substrate 122 comes into contactwith the transparent resistive film 132. Then, in step S1-3, theinterface board 112 obtains a corresponding X-coordinate based on thethus-detected electric potential on the transparent resistive film 132formed on the lower substrate 121.

Next, in step S1-4, the interface board 112 applies a voltage Vy to thefirst wire 136-1 and the fourth wire 136-4, and grounds the second wire136-2 and the third wire 136-3. Thus, the voltage Vy is applied to thefirst and fourth corners (corresponding to the first and fourth throughholes 151-1 and 151-4) of the common electrode 134, and the second andthird corners (corresponding to the second and third through holes 151-2and 151-3) of the common electrode 134 are grounded. As a result, anelectric potential distribution is created along the four sides of thecommon electrode 134. Then, from the four sides of the common electrode134 along which the electric potential distribution is thus created,electric potentials are provided to the inside to the transparentresistive film 132 via the respective ones of the electric potentialproviding parts 141. As a result, an electric potential distributionwhich is uniform along the direction of Y1-Y2 as depicted by brokenlines in FIG. 8B is created on the transparent resistive film 132. It isnoted that, in the related art, an electric potential distribution maybe distorted as depicted by dash-dotted lines in FIG. 8B. According tothe coordinate detecting device in the embodiment, such distortion isavoided by the function of the resistive film removed part 133 or theelectric potential providing parts 141, and precise detection of anX-coordinate can be carried out.

Next, in step S1-5, the interface board 112 detects, via the uppersubstrate 122 and the fifth wire of the FPC cable 124, an electricpotential on the transparent resistive film 132 at the above-mentionedcertain position at which the upper substrate 122 comes into contactwith the transparent resistive film 132. Then, in step S1-6, theinterface board 112 obtains a corresponding Y-coordinate based on thethus-detected electric potential on the transparent resistive film 132formed on the lower substrate 121.

Thus, in the coordinate detecting device according to the embodiment,the first through fourth wires 136-1, 136-2, 136-3 and 136-4 arelaminated above the common electrode 134, as depicted in FIGS. 4B, 4Cand 4E, and thus, it is possible to reduce the size of the panel part111. Further, by forming the resistive film removed parts 133, theelectric potential distribution created on the transparent resistivefilm 132 on the lower substrate 121 when an X-coordinate or aY-coordinate is detected can be made uniform along the direction ofX1-X2 or the direction Y1-Y2, as mentioned above with reference to FIGS.8A and 8B. As a result, it is possible to carry out precise coordinatedetection.

(Manufacturing Method)

Next, a manufacturing method carried out by the manufacturing apparatusin the embodiment for manufacturing the coordinate detecting devicedescribed above will be described. Specifically, a manufacturing methodfor manufacturing the above-mentioned lower substrate 121 will bedescribed, with reference to FIGS. 4A, 4B, 4C, 4D and 4E.

First, on the glass substrate 131, the transparent resistive film 132made of ITO or such is formed in a sputtering method, a vacuumdeposition method, or such.

Next, on the transparent resistive film 132, the common electrode 134made of Ag—C or such is formed. Specifically, a paste including Ag—C orsuch is used, screen printing is carried out for forming a correspondingpattern, and then, baking is carried out. Thus, the common electrode 134is formed.

Next, the resistive film removed parts 133 are formed in the transparentresistive film 132. Specifically, with the use of the manufacturingapparatus described with reference to FIG. 1, through the glasssubstrate 131, laser light is irradiated to corresponding positions onthe transparent resistive film 132 at which the transparent resistivefilm 132 is to be removed. Thus, by ablation, the transparent resistivefilm 132 is removed at the above-mentioned corresponding positions forthe resistive film removed parts 133. At this time, a position of theglass substrate 131 is moved by means of the X-Y table 51, laser lightis irradiated by the laser light source 52 based on a signal of thecontrol circuit 54, and thus, the transparent resistive film 132 isremoved at the above-mentioned corresponding positions for the resistivefilm removed parts 133.

As mentioned above with reference to FIG. 1, removal of thecorresponding portions of the transparent resistive film 132 to form theresistive film removed parts 133 is carried out based on information ofthe electric potentials measured by means of the probes 57 and theelectric potential measuring unit 58. Specifically, there are twomethods. A first method is such that, first, a voltage is applied to thetransparent resistive film 132 via the common electrode 134 with the useof the probes 57 and the electric potential measuring unit 58. As aresult, electric potentials, thus appearing on the transparent resistivefilm 132, are measured by means of the probes 57 and the electricpotential measuring unit 58. According to the thus-obtained electricpotentials, an electric potential distribution created on thetransparent resistive film 132 for each of the direction X1-X2 and thedirection of Y1-Y2, such as that depicted in FIG. 8A or 8B, can beobtained. Based on the thus-obtained electric potential distribution, anactual configuration of the resistive film removed parts 133 isdetermined in such a manner that, when distortion is included in thethus-obtained electric potential distribution, the distortion is to becanceled. Then, according to the thus-determined actual configuration ofthe resistive film removed parts 133, the resistive film removed parts133 are formed with the use of the laser light source 52 and the X-Ytable 51.

A second method is such that, after the above-mentioned first method iscarried out, a voltage is again applied to the transparent resistivefilm 132 via the common electrode 134 with the use of the probes 57 andthe electric potential measuring unit 58. Then, electric potentials thusappearing on the transparent resistive film 132 are again measured bymeans of the probes 57 and the electric potential measuring unit 58, andaccording to the thus-obtained electric potentials, an electricpotential distribution created on the transparent resistive film 132 foreach of the direction X1-X2 and the direction of Y1-Y2 can be obtained.Based on the thus-obtained electric potential distribution, theabove-mentioned actual configuration of the resistive film removed parts133 already determined in the first method is modified if distortionstill remains in the electric potential distribution, in such a mannerthat the remaining distortion is to be canceled. Then, according to thethus-modified configuration, the resistive film removed parts 133already formed in the first method are corrected with the use of thelaser light source 52 and the X-Y table 51.

Next, the first insulative film 135 having the first through fourththrough holes 151-1, 151-2, 151-3 and 151-4 is formed. Specifically, aninsulative paste is used, screen printing is carried out for forming acorresponding pattern, and then, baking is carried out. Thus, the firstinsulative film 135 is formed.

Next, the first through fourth wires 136-1, 136-2, 136-3 and 136-4 madeof Ag or such are formed on the first insulative film 135. Specifically,an electrically conductive paste including Ag is used, screen printingis carried out for forming a corresponding pattern, and then, baking iscarried out. Thus, the first through fourth wires 136-1, 136-2, 136-3and 136-4 are formed.

Next, the second insulative film 137 is formed. Specifically, aninsulative paste is used, screen printing is carried out for forming acorresponding pattern, and then, baking is carried out. Thus, the secondinsulative film 137 is formed.

Thus, the lower substrate 121 is manufactured.

(Control Circuit of Manufacturing Apparatus)

The control circuit 54 depicted in FIG. 54 may include a computer whichcontrols operation of the control circuit 54 such that the controlcircuit 54 can automatically carry out the above-mentioned first methodor the second method to measure electric potentials on the transparentresistive film 132 with the use of the probes 57 and the electricpotential measuring unit 58, determine the configuration of theresistive film removed parts 133 and form the resistive film removedparts 133 with the use of the laser light source 52 and the X-Y table51.

FIG. 10 depicts a block diagram of a computer applicable as theabove-mentioned computer which the control circuit 54 may include. Asdepicted in FIG. 10, the computer includes a CPU 1110 for carrying outvarious operations by executing instructions written in the program; aninput part 1130 such as a keyboard, a mouse, and so forth, for anoperator to input operation contents or data; a display part 1140 suchas a CRT, a liquid crystal display device or such, for displaying, tothe operator, a processing progress, a processing result or such of theCPU 1110; a memory 1120 such as a ROM, a RAM and so forth, for storingthe program to be executed by the CPU 1110, or to be used as a work areaof the CPU 1110; a hard disk drive 1150 for storing the program, dataand so forth; a CD-ROM drive 1160 for loading the program or data fromthe outside with the use of a CD-ROM 1161 as an information recordingmedium; and a modem 1170 for downloading the program or such, from anexternal server via a communication network 1180 such as the Intent, LANor such.

The computer depicted in FIG. 10 loads or downloads the program havingthe instructions for causing the CPU 1110 to carry out theabove-mentioned first method or the second method to measure electricpotentials on the transparent resistive film 132 with the use of theprobes 57 and the electric potential measuring unit 58, to determine theconfiguration of the resistive film removed parts 133 and to form theresistive film removed parts 133 with the use of the laser light source52 and the X-Y table 51, according to the instructions written in theprogram. The CD-ROM 1161 may be used as an information recording mediumfor loading the program. Also, the communication network 1180 may beused for downloading the program. The program is then installed in thehard disk drive 1150, is loaded on the memory 1120, and is executed bythe CPU 1110. As a result, the computer carries out the above-mentionedfirst method or the second method to measure electric potentials on thetransparent resistive film 132 with the use of the probes 57 and theelectric potential measuring unit 58, determine the configuration of theresistive film removed parts 133 and form the resistive film removedparts 133 with the use of the laser light source 52 and the X-Y table51.

All examples and conditional language recited herein are intended forpedagogical purposes to aid the reader in understanding the inventionand the concepts contributed by the inventor to furthering the art, andare to be construed as being without limitation to such specificallyrecited examples and conditions, nor does the organization of suchexamples in the specification relate to a showing of the superiority andinferiority of the invention. Although the embodiment of the presentinvention has been described in detail, it should be understood thatvarious changes, substitutions, and alterations could be made heretowithout departing from the spirit and scope of the invention.

What is claimed is:
 1. A manufacturing apparatus of a coordinatedetecting device, comprising: a plurality of probes each provided at aposition which comes into contact with a surface of a resistive filmthat is transparent in a visible region and formed on one surface of atransparent glass substrate of the coordinate detecting device tomeasure electric potentials of the surface of the resistive film towhich a voltage is applied via a common electrode of the coordinatedetecting device, wherein said surface of the resistive film faces awayfrom the transparent glass substrate; a laser light source provided at aposition facing the other surface of the transparent glass substrateopposite to said one surface, which irradiates laser light toward theresistive film through the transparent glass substrate to remove a partof the resistive film and form a resistive film removed part based onthe electric potentials measured with the plurality of probes; anoptical system which converges the laser light; an X-Y table which movesthe substrate of the coordinate detecting device at leasttwo-dimensionally; and a control part which controls the X-Y table andthe laser light source.
 2. The manufacturing apparatus of a coordinatedetecting device, as claimed in claim 1, wherein: the resistive film ismade of a material including ITO, or indium oxide, tin oxide or zincoxide.
 3. The manufacturing apparatus of a coordinate detecting device,as claimed in claim 1, wherein: a wavelength of the laser light fallswithin a range between 340 nm and 420 nm.
 4. The manufacturing apparatusof a coordinate detecting device, as claimed in claim 1, wherein: thecontrol part is configured to control the X-Y table and the laser lightsource to form the resistive film removed part at a position along thecommon electrode to control electric potentials provided to theresistive film via the common electrode to make uniform an electricpotential distribution created on the resistive film.
 5. A manufacturingapparatus of a coordinate detecting device that includes a transparentglass substrate that has a resistive film formed on one surface thereof,the manufacturing apparatus comprising: a plurality of probes eachprovided at a position which comes into contact with a surface of theresistive film formed on said one surface of the transparent glasssubstrate to measure electric potentials of the surface of the resistivefilm to which a voltage is applied via a common electrode of thecoordinate detecting device, wherein said surface of the resistive filmfaces away from the transparent glass substrate; a laser light sourceprovided at a position facing the other surface of the transparent glasssubstrate opposite to said one surface, which irradiates laser lighttoward the resistive film through the transparent glass substrate toremove a part of the resistive film from the transparent glasssubstrate, wherein a wavelength of the laser light falls within a rangebetween 340 nm and 420 nm; an optical system which converges the laserlight toward the resistive film; an X-Y table which moves thetransparent glass substrate in an X-Y plane; and a control part whichcontrols the X-Y table and the laser light source, wherein the controlpart controls the laser light source to irradiate the laser light basedon the electric potentials measured with the plurality of probes.
 6. Themanufacturing apparatus of a coordinate detecting device as claimed inclaim 5, wherein the resistive film is a transparent resistive film. 7.A manufacturing apparatus that removes a resistive film from atransparent glass substrate, the manufacturing apparatus comprising: aplurality of probes each provided at a position which comes into contactwith a surface of the resistive film formed on one surface of thetransparent glass substrate to measure electric potentials of thesurface of the resistive film to which a voltage is applied via a commonelectrode, wherein said surface of the resistive film faces away fromthe transparent glass substrate; a laser light source provided at aposition facing the other surface of the transparent glass substrateopposite to said one surface, which irradiates laser light toward theresistive film through the transparent glass substrate to remove a partof the resistive film from said one surface of the transparent glasssubstrate; an optical system which converges the laser light toward theresistive film; and a control part which controls the irradiation of thelaser light from the laser light source based on the electric potentialsmeasured with the plurality of probes.
 8. The manufacturing apparatus asclaimed in claim 7, wherein a wavelength of the laser light falls withina range between 340 nm and 420 nm.
 9. The manufacturing apparatus of acoordinate detecting device as claimed in claim 1, wherein the pluralityof probes is provided in a space formed inside the X-Y table.